PRODUCTS
ACTUATION SYSTEM
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XY stage for exposure/high precision inspection equipment SA/SL Series
Precision positioning device XY stage
Ideal for high-speed wafer scanning operations
Reduce equipment vibration to a minimum
Z mechanism and θ mechanism options -
Vacuum Air Servo stage
Precision positioning system XY stage
This stage implements a noncontact drive system supported by an aerostatic bearing under high vacuum condition
No cooling system is needed, since any heat sources are not installed in vacuum chamber.
The stage is consisted of ceramics not to cause harmful effect to EB.
