PRODUCTS
PP78+MC78
PP78+MC78
“PP78” is a position measurement signal processing unit that uses unique hardware processing to output highly accurate timing pulses synchronized with the stage position.
It is equipped with functions essential for ultra-precision scanning, such as an interpolator function, pitch error correction function, alignment error correction function, and environment correction function (when using a laser interferometer).
It is equipped with functions essential for ultra-precision scanning, such as an interpolator function, pitch error correction function, alignment error correction function, and environment correction function (when using a laser interferometer).
Features
High-performance controller compliant with compact PCI
- Semiconductor inspection/manufacturing equipment
- FPD inspection/manufacturing equipment
- Various industrial machinery
Specification
| Items | Specification |
|---|---|
| Number of control axes | Up to 4 axes |
| Sensor interface | Exclusive selection from digital A/B/Z phase, analog Sin/Cos, clock synchronous binary parallel (optional) |
| Upper interface | CompactPCI BUS PICMG2.1 R2.2 compliant 32bit 33MHz, Ethernet (100Mbps), USB (Ver1.1), RS232C |
| Position synchronization pulse output function | Rising/falling individual coordinate specification mode (up to 131,072 points defined per recipe) Absolute coordinate synchronization pulse width specification mode (maximum 131,072 points defined per recipe) Start point, end point, pulse position interval, pulse width (output time) specification mode |
| Number of synchronous pulse output points | Maximum 6ch (Each channel can be selected independently from RS422 differential output or 30V open collector output) |
| Synchronous pulse time resolution | 100ns (processing clock frequency 10MHz) |
| Pitch error correction function | 1D and 2D pitch error correction (Available when incorporated into the servo loop. Applicable to orthogonality/straightness correction) Number of tables: max. 16 (row: max. 32,767 points x column: max. 32,767 points, total 32,767 points) Correction calculation speed: 375 μs (for 2-dimensional 4 surfaces) |
| Operating temperature/ambient temperature | 5~45℃/0~65℃ |
| Operating humidity/storage humidity | 30~90%RH (no condensation) |
| External dimensions/mass | W125×D250×H260mm |