PRODUCTS
SM/SL/SSL
Linear motor
This is a linear motor that suppresses the generation of side force with a uniquely developed I-type coil format, and minimizes thrust ripple through design optimization of the magnetic circuit and coil arrangement, as well as highly accurate assembly.
Enables highly accurate scanning operation.
Enables highly accurate scanning operation.
Features
Linear motor enables highly accurate scanning operation
- Precision stage in the semiconductor manufacturing field
- Precision stage in FPD manufacturing field
Specification
| Items | SM-2 | SM-3 | SM-4 | SM-6 |
|---|---|---|---|---|
| Rated thrust | 76N | 112N | 148N | 219N |
| Maximum thrust | 228N | 336N | 444N | 657N |
| Rated current | 1.22Arms | 1.19Arms | 2.37Arms | 2.33Arms |
| Maximum current | 3.65Arms | 3.58Arms | 7.10Arms | 7.00Arms |
| Mover length (L1) | 145mm | 206mm | 267mm | 389mm |
| Stator length (L2) | 183mm(SMY-3)、244mm(SMY-4) | |||
| Width (W) | 36mm | |||
| Height (H) | 87.5mm | |||
| Items | SL-4 | SL-6 | SL-8 | SL-10 |
|---|---|---|---|---|
| Rated thrust | 320N | 456N | 600N | 783N |
| Maximum thrust | 960N | 1,368N | 1800N | 2,349N |
| Rated current | 4.06Arms | 3.86Arms | 5.07Arms | 5.29Arms |
| Maximum current | 12.19Arms | 11.58Arms | 15.21Arms | 16.00Arms |
| Mover length (L1) | 315mm | 459mm | 603mm | 747mm |
| Stator length (L2) | 216mm(SLY-3)、288mm(SLY-4) | |||
| Width (W) | 54.8mm | |||
| Height (H) | 121.4mm | |||
| Items | SSL-4 | SSL-6 | SL-8S | SSL-10 |
|---|---|---|---|---|
| Rated thrust | 614N | 910N | 1204N | 1500N |
| Maximum thrust | 1842N | 2730N | 3612N | 4500N |
| Rated current | 5.33Arms | 7.91Arms | 10.46Arms | 13.03Arms |
| Maximum current | 16.00Arms | 23.72Arms | 31.38Arms | 39.00Arms |
| Mover length (L1) | 434mm | 633.2mm | 832.4mm | 1031.6mm |
| Stator length (L2) | 298.8mm(SSLY-3)、398.4mm(SSLY-4) | |||
| Width (W) | 59.4mm | |||
| Height (H) | 166mm | |||