PRODUCTS
MOTION COMPONENT
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MC78
Motion controller
The MC78 is a highperformance controller designed to provide highspeed servo processing and optimal control algorithms for equipment. Multiaxial perfect synchronous control systems with full digital interfaces can be realized through combination with the servo driver SD series or the position measurement signal processing unit PP78.
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PP78+MC78
PP78+MC78
PP78 is a position measurement signal processing unit that uses unique hardware processing to output highly accurate timing pulses synchronized with the stage position. It is equipped with functions essential for ultra-precision scanning, such as an interpolator function, pitch error correction function, alignment error correction function, and environment correction function (when using a laser interferometer).
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SDLN/SDPH
Servo driver
The SDLN series is an ultra-high performance servo driver that enables automatic switching between nanometer-class high-precision linear operation and high-output PWM operation, and is equipped with a linear amplifier developed for ultra-precision applications. We are currently developing the next generation machine.
The SDPH series is a high-performance PWM operation type servo driver developed for medium to high output. It boasts high speed stability thanks to its built-in high-speed switching element and highly accurate current feedback circuit, making it ideal for short-time positioning applications. -
SM/SL/SSL
Linear motor
This is a linear motor that suppresses the generation of side force with a uniquely developed I-type coil format, and minimizes thrust ripple through design optimization of the magnetic circuit and coil arrangement, as well as highly accurate assembly.
Enables highly accurate scanning operation. -
Airsonic 50N/100N/300N/700N
Air actuator
By using a uniquely developed control algorithm and air bearings, we achieve high-speed, high-precision positioning and high-precision load control using air drive.
By adopting air drive, it is clean and generates no dust and no heat. Additionally, by using air bearings, the need for applying grease can be eliminated, greatly improving maintainability.
