Air Servo Stage

The high-performance motion controller can coordinate multiple axes (motion control, stage servo control) and incorporate an optimal control algorithm for the equipment at high speed. In conjunction with components such as the servo controller, position measurement signal processing unit (PMIF), and remote I/O in a dedicated high-speed network, the controller provides a fully synchronized multi-axis control system with a fully digital interface.

Dedicated controller for slider control, featuring a proprietary control algorithm for high-speed servo calculation, a disturbance observer, and pneumatic actuator control. Sends commands to two opposing servo valves, achieving high responsiveness. Two units can also be combined for translation and yaw axis control for two axes.

The length measurement unit (PMIF) is a VME bus rack-mounted signal processing unit for position measurement. Stage position measurement values are captured from position sensors. As position measurement values, the unit can capture interferometer output, linear scale signals, and high-speed communication (LVDS). It is equipped with functions essential for ultra high-precision scanning, such as interpolation, pitch and alignment error correction, and environment correction (when a laser interferometer is used). Proprietary hardware processing enables output of highly precise timing pulses synchronized with the stage position.